Source/drain junction formation

ABSTRACT

An embodiment method of forming a source/drain region for a transistor includes forming a recess in a substrate, epitaxially growing a semiconductor material in the recess, amorphizing the semiconductor material, and doping the semiconductor material to form a source/drain region. In an embodiment, the doping utilizes either phosphorus or boron as the dopant. Also, the amorphizing and the doping may be performed simultaneously. The amorphizing may be performed at least in part by doping with helium.

BACKGROUND

Semiconductor devices are used in a large number of electronic devices, such as computers, cell phones, and others. Semiconductor devices comprise integrated circuits that are formed on semiconductor wafers by depositing many types of thin films of material over the semiconductor wafers, and patterning the thin films of material to form the integrated circuits. Integrated circuits include field-effect transistors (FETs) such as metal oxide semiconductor (MOS) transistors.

One of the goals of the semiconductor industry is to continue shrinking the size and increasing the speed of individual FETs. To achieve these goals, fin FETs (FinFETs) or multiple gate transistors are used in sub 32 nm transistor nodes. FinFETs not only improve areal density, but also improve gate control of the channel.

Unfortunately, as FinFETs become smaller and smaller, the processing steps used to fabricate the FinFETs may produce undesirable and unintended consequences. For example, the method of forming the source and drain regions in a FET or a FinFET may negatively impact the device or the device yield.

BRIEF DESCRIPTION OF THE DRAWINGS

For a more complete understanding of the present disclosure, and the advantages thereof, reference is now made to the following descriptions taken in conjunction with the accompanying drawing, in which:

FIG. 1 is a perspective view of a basic FinFET device having portions cut away for the purpose of illustration;

FIG. 2 is a cross section of the basic FinFET device of FIG. 1 taken generally along line x-x;

FIGS. 3-8 collectively illustrate an embodiment process flow for forming a source/drain region for a FinFET;

FIGS. 9-13 collectively illustrate an embodiment process flow for forming a source/drain region for a FinFET;

FIG. 14 is a graph illustrating the concentration of phosphorus determined using secondary ion mass spectrometry (SIMS);

FIG. 15 is a graph illustrating the concentration of phosphorus determined using SIMS; and

FIG. 16 is a series of images obtained by a transmission electron microscope (TEM).

Corresponding numerals and symbols in the different figures generally refer to corresponding parts unless otherwise indicated. The figures are drawn to clearly illustrate the relevant aspects of the embodiments and are not necessarily drawn to scale.

DETAILED DESCRIPTION OF ILLUSTRATIVE EMBODIMENTS

The making and using of the present embodiments are discussed in detail below. It should be appreciated, however, that the present disclosure provides many applicable inventive concepts that can be embodied in a wide variety of specific contexts. The specific embodiments discussed are merely illustrative, and do not limit the scope of the disclosure.

The present disclosure will be described with respect to embodiments in a specific context, namely a FinFET metal oxide semiconductor (MOS). The concept may also be applied, however, to other integrated circuits and electronic structures including, but not limited to, a planar field-effect transistor (FET), a multiple gate field-effect transistor (MuGFET), and nanowire devices.

FIGS. 1-2 represent a FinFET 10 in accordance with an embodiment, which will be briefly described. The FinFET 10 includes a substrate 12 supporting several fins 14, which are at least partially embedded in isolation regions 16. In an embodiment, the isolation regions 16 comprise shallow trench isolation (STI) regions. The substrate 12 may be formed from bulk silicon, silicon, germanium, silicon germanium, a silicon-containing material, silicon-on-insulator (SOI), or another suitable semiconductor material. In an embodiment, the semiconductor substrate 12 is a p-type substrate.

The fins 14 generally extend between source/drain regions 18 of the FinFET 10. The fins 14 may be formed from, for example, silicon, germanium, silicon germanium, a silicon-containing material, or another suitable fin material. The gate electrode structure 22 of FIGS. 1-2 may include several discrete layers or components such as, for example, an interfacial oxide layer, a high-k-dielectric layer, and a metal gate layer. Spacers 20, which are stacked upon a portion of the fins 14 adjacent the source/drain regions 18 and may be formed from a nitride (e.g., Si₃N₄), are disposed on opposing sides of a gate electrode structure 22 depicted in FIG. 2. As discussed below, source/drain regions 18 are formed having an ultra shallow junction. One of the challenges in forming an ultra shallow junction (e.g., a p-n junction) in the source/drain region of a device is minimizing the sheet resistance (Rs) for a given junction depth (Xj). Embodiments of the process disclosed herein permit formation of the ultra shallow junction while providing a suitably low sheet resistance.

As will be more fully explained below, FIGS. 3-8 collectively illustrate an embodiment process flow for forming a source/drain region in an NMOS FinFET device and FIGS. 9-13 collectively illustrate an embodiment process flow for forming a source/drain region in an PMOS FinFET device. The process flows described herein may be also be used to form source/drain regions in other semiconductor devices (e.g., a planar FET, a MuGFET, etc.).

As shown in FIG. 3, recesses 30 are formed in a substrate 32. As will be more fully explained below, the recesses 30 represent areas where source and drain regions of the device will eventually be formed. In an embodiment, the recesses 30 may be formed through, for example, an etching or other suitable process. As shown, portions of the substrate 32 between the recesses 30 may be protected by, for example, a protective feature 31 such as, for example, a dummy gate, a mask, a resist, spacers, and so on. In other words, the protective feature 31 protects what will eventually be the channel region of the device.

The substrate 32 may be formed from bulk silicon, silicon, germanium, silicon germanium, a silicon-containing material, silicon-on-insulator (SOI), or another suitable semiconductor material. In an embodiment, the semiconductor substrate 32 is either a p-type substrate or an n-type substrate and may include one or more p-type or n-type wells therein.

Referring now to FIGS. 3-4, an n-type semiconductor material 34 is formed in the recesses 30 using an epitaxy process. In an embodiment, the n-type semiconductor material comprises silicon phosphorous (SiP). In an embodiment, the n-type semiconductor material comprises silicon phosphorous having a concentration of less than about 1×10²⁰ atoms per centimeter cubed to about 7×10²⁰ atoms per centimeter cubed.

Thereafter, and as shown in FIG. 5, a pre-amorphization doping of the n-type semiconductor material 34 is performed using helium (He) and a plasma doping (PLAD) 36. As used herein, the pre-amorphization doping may be referred to as a pre-amorphization implant (PAI). In an embodiment, the plasma doping of the helium may act as or provide a buffer layer to retard or prevent post-plasma doping diffusion of a phosphorous dopant, which will be discussed below.

In an embodiment, the plasma doping 36 of the helium is performed at an energy of between about 0.4 kiloelectron-volts (keV) about 1.0 kiloelectron-volts. In an embodiment, the plasma doping 36 of the helium is performed using a variable energy to prevent bubble defects in the n-type semiconductor material 34. Bubble defects, which are undesirable pockets of gas in the semiconductor material 34, may occur if, for example, a depth of the doping is too great (e.g., greater than about 10 to 20 nm) and the doping energy remains constant.

By way of example, the energy of the plasma doping 36 may be linearly increased from 0.4 kiloelectron-volts (keV) to about 1.0 kiloelectron-volts, linearly decreased from 1.0 kiloelectron-volts (keV) to about 0.4 kiloelectron-volts, or otherwise varied during the doping process. In an embodiment, a dose of the helium is between about 1.0×10¹⁶ atoms per centimeter squared and about 2.0×10¹⁶ atoms per centimeter squared.

In an embodiment, a concentration of the helium in the n-type semiconductor material 34 after the doping by plasma doping 36 is between about ten percent to about 60 percent of the PLAD dose.

Next, as shown in FIG. 6, a doping of phosphorous (P) into the n-type semiconductor material 34 is performed using plasma doping 38 in order to form a source/drain region 40. In an embodiment, phosphorus is doped in the n-type semiconductor material 34 utilizing about 0.5% PH₃ and about 99.5% H₂. In an embodiment, the plasma doping 38 of the phosphorous is performed at a constant energy of between about 2 kiloelectron-volts (keV) and about 10 kiloelectron-volts (keV). The phosphrous (P) plasma doping may be performed with or without pre PLAD He amorphization doping.

In an embodiment, the plasma doping 38 of the phosphorous is performed with a variable energy to prevent bubble defects in the n-type semiconductor material 34. In an embodiment, the plasma doping 38 of the phosphorous is performed with a variable energy of about 5 kiloelectron-volts (keV) to about 3 kiloelectron-volts (keV). In an embodiment, the plasma doping 38 of the phosphorous is performed with a variable energy of about 6 kiloelectron-volts (keV) to about 4 kiloelectron-volts (keV). The energy of the plasma doping 36 may be linearly increased from 3 kiloelectron-volts (keV) to about 5 kiloelectron-volts, linearly decreased from 6 kiloelectron-volts (keV) about 4 kiloelectron-volts, or otherwise varied during the doping process.

In an embodiment, a dose of the phosphorus is between about 1×10¹⁶ atoms per centimeter squared to 2×10¹⁶ atoms per centimeter squared. In an embodiment, a collective process time of the plasma doping 36 in FIG. 5 and the plasma doping 38 of FIG. 6 is less than about thirty (30) seconds.

After the phosphorus doping 38 has been performed, a silicide layer 42 is formed over the source/drain region 40 as shown in FIG. 7. In an embodiment, a high K loop and an OLD loop process are performed before the silicide layer 42 is formed. However, for the sake of brevity, these processes have not been illustrated or explained in detail. In an embodiment, the silicide layer 42 has a depth of about eight to about twelve nanometers. The silicide layer 42 may have other depths in other embodiments or in other devices.

In an embodiment, a concentration of the phosphorus in the source/drain region 40 beneath the silicide layer 42 is between about 2.0×10²¹ atoms per centimeter cubed and about 4.0×10²¹ atoms per centimeter cubed. In other words, the concentration of the phosphorus at the interface of the bottom surface of the silicide layer 42 and top surface of the underlying source/drain material 34 is between about 2.0×10²¹ atoms per centimeter cubed and about 4.0×10²¹ atoms per centimeter cubed.

After the silicide layer 42 has been formed, an anneal process is performed. As will be more fully explained below, the anneal process permits portions of the source/drain regions 40 damaged during doping to be recrystallized or repaired.

In an embodiment, the anneal process comprises a millisecond anneal. In an embodiment, the millisecond anneal is performed using a laser anneal (LSA), at a temperature of about 900° C. to about 1200° C., and for a time of about 10 microseconds (μs) to about 2 milliseconds (ms). In an embodiment, the millisecond anneal is performed using a flash anneal (uSSA), at a temperature of about 700° C. to about 1000° C., and for a time of about 0.8 ms to about 5 ms.

In an embodiment, the anneal process comprises a microwave anneal. Microwave annealing of layers in semiconductors is an application of thermal processing of semiconductors, with low processing temperature eliminating unwanted diffusion as one of the potential advantages. In an embodiment, the microwave anneal is performed using a free carrier absorption technique. In an embodiment, the microwave anneal is performed using a dipolar polarization or/and interfacial polarization heating. In an embodiment, the microwave anneal is performed at a temperature of about 300° C. to about 600° C., and for a time of about 30 seconds to about 300 seconds.

In an embodiment, the pre-amorphization doping permits the anneal process to be performed at a relatively low temperature such as, for example, between about 400° C. to about 600° C. Notably, when the pre-amorphization doping process is employed a more defect rich area will be formed, which will enhance the microwave reaction with the doped area.

Thereafter, the protective feature 31 (e.g., the dummy gate) of FIG. 7 may be removed using a conventional removal process and then replaced with the metal gate or a gate electrode structure 46 as shown in FIG. 8 using a conventional gate formation process. As shown in FIG. 8, the gate electrode structure 46 and the spacers 44 are disposed over fins 48 adjacent the source/drain regions 40 to form a channel in the FinFET 50.

Those skilled in the art will recognized that further or additional processing steps may be taken to form the FinFET 50 of FIG. 8. In addition, the FinFET 50 of FIG. 8 may contain or include additional materials, features, and layers in different embodiments.

Referring now to FIGS. 9-13, an embodiment process flow for forming a source/drain region for a FinFET is collectively illustrated. The process flow may be also be used to form source/drain regions in other semiconductor devices (e.g., a planar FET, a MuGFET, etc.). As shown in FIG. 9, recesses 60 are formed in a substrate 62. As will be more fully explained below, the recesses 60 represent areas where source and drain regions of the device will eventually be formed. In an embodiment, the recesses 60 may be formed through, for example, an etching or other suitable process. As shown, portions of the substrate 62 between the recesses 60 may be protected by, for example, a protective feature 61 such as, for example, a dummy gate, a mask, a resist, and so on. In other words, the protective feature 61 protects what will eventually be the channel region of the device.

The substrate 62 may be formed from bulk silicon, silicon, germanium, silicon germanium, a silicon-containing material, silicon-on-insulator (SOI), or another suitable semiconductor material. In an embodiment, the semiconductor substrate 62 is either a p-type substrate or an n-type substrate and may include one or more p-type or n-type wells therein.

Referring now to FIGS. 9-10, a p-type semiconductor material 64 is formed in the recess 60 using an epitaxy process. In an embodiment, the p-type semiconductor material comprises silicon germanium boron (SiGeB).

Thereafter, as shown in FIG. 11, a pre-amorphization doping boron (B) and helium (He) into the p-type semiconductor material 64 is performed simultaneously using plasma doping 66 to form a source/drain region 68. In an embodiment, the boron comprises B₂H₆. In an embodiment, the doping of boron and helium comprises about 0.3% to about 5% B₂H₆ and about 95% to about 99.7% helium. In an embodiment, the doping of boron and helium comprises about 0.5% B₂H₆ and about 99.5% helium.

In an embodiment, the plasma doping 66 of the boron and helium is performed at an energy of between about 0.4 kiloelectron-volts (keV) and about 0.6 kiloelectron-volts. In an embodiment, a dose of the boron is about 4.5×10¹⁶ atoms per centimeter squared. In an embodiment, a process time of the plasma doping 66 in FIG. 11 is less than about fifteen (15) seconds.

After the plasma doping 66 has been performed, a silicide layer 70 is formed over the source/drain region 40 as shown in FIG. 12. In an embodiment, the silicide layer 70 has a depth of about eight to about twelve nanometers. The silicide layer 70 may have other depths in other embodiments or in other devices.

In an embodiment, a concentration of the boron in the source/drain region 68 beneath the silicide layer 70 is between about 3.0×10¹⁵ atoms per centimeter cubed and about 1.0×10¹⁶ atoms per centimeter cubed.

After the silicide layer 70 has been formed, an anneal process is performed. As will be more fully explained below, the anneal process permits portions of the source/drain regions 64 damaged during doping to be recrystallized or repaired.

In an embodiment, the anneal process comprises a millisecond anneal. In an embodiment, the millisecond anneal is performed using a laser anneal (LSA), at a temperature of about 900° C. to about 1200° C., and for a time of about 10 microseconds (μs) to about 2 milliseconds (ms). In an embodiment, the millisecond anneal is performed using a flash anneal (uSSA), at a temperature of about 700° C. to about 1000° C., and for a time of about 0.8 ms to about 5 ms.

In an embodiment, the anneal process comprises a microwave anneal. In an embodiment, the microwave anneal is performed using a free carrier absorption technique. In an embodiment, the microwave anneal is performed using a dipole resonance heating. In an embodiment, the microwave anneal is performed at a temperature of about 300° C. to about 600° C., and for a time of about 30 seconds to about 300 seconds.

In an embodiment, the pre-amorphization doping permits the anneal process to be performed at a relatively low temperature such as, for example, between about 400° C. to about 600° C. Notably, when the pre-amorphization doping process is employed a more defect rich area will be formed, which will enhance the microwave reaction with the doped area.

Thereafter, the protective feature 61 (e.g., the dummy gate) of FIG. 12 may be removed using a conventional removal process and then replaced with the metal gate or a gate electrode structure 80 as shown in FIG. 13 using a conventional gate formation process. As shown in FIG. 13, the gate electrode structure 76 and the spacers 74 are disposed over fins 78 adjacent the source/drain regions 64 to form a channel in the FinFET 80.

Those skilled in the art will recognized that further or additional processing steps may be taken to form the FinFET 80 of FIG. 13. In addition, the FinFET 80 of FIG. 13 may contain or include additional materials, features, and layers in different embodiments.

In an embodiment, the process depicted in FIGS. 9-13 may be performed in addition to the process depicted in FIGS. 3-8 in order to form a device with both PMOS and NMOS transistors. In an embodiment, the process of FIGS. 9-13 may be performed first, followed by the process of FIGS. 3-8. In another embodiment, the process of FIGS. 3-8 may be performed first, followed by the process of FIGS. 9-13.

Referring now to FIG. 14, a graph 90 illustrating the concentration of phosphorus, which is determined using secondary ion mass spectrometry (SIMS), is provided. As a practical matter, the peak doping concentration of the phosphorous is measured at a depth below the surface (e.g., about 8-12 nanometers) to minimize surface noise effects.

As shown in FIG. 14, the chart includes four curves representing the phosphorus concentration (Y-axis) relative to the depth of the source/drain (X-axis). As shown, each of the curves was produced using an energy or bias of 2 kV. Two of the curves were produced using a “Lo PAI” while the other two curves were produced using a “Hi PAI”. As used herein, the Lo PAI means a dose of helium of 1.0×10¹⁶ atoms per centimeter squared and the Hi PAI means a dose of helium above that amount. Continuing, two of the curves were produced where no clean was performed, while the other two curves were produced after a clean of the surface of the source/drain region was performed.

As is well known in the art, the dose of the phosphorus retained in the silicon is lower than the dose of the phosphorus doped in the silicon (e.g., 1.0×10¹⁶ atoms per centimeter squared). For the illustrated doping conditions in FIG. 14, the dose of the phosphorus retained in the source/drain was calculated from the curves to be 3.67×10¹⁵ atoms per centimeter squared, 3.85×10¹⁵ atoms per centimeter squared, 1.1×10¹⁵ atoms per centimeter squared, and 1.13×10¹⁵ atoms per centimeter squared.

Still referring to FIG. 14, when the process conditions were Hi PAI, 2 kV bias, a dose of 1.0×10¹⁶ atoms per centimeter squared, with no clean and no anneal, the junction depth at a phosphorus concentration of 5×10¹⁸ atoms per centimeter cubed was measured to be 19.5 nanometers. In this context, junction depth refers to the junction between the phosphorous and boron (not shown) at 5×10¹⁸ atoms per centimeter cubed. Notably, the junction depth could have been measured at other phosphorus concentrations. Indeed, the point is simply to make all measurements at the same concentration to provide a consistent reference point for comparison purposes.

As shown in FIG. 14, the abruptness (abr) of the junction was found to be 3.5 nanometers per decade. In other words, the slope of the curve at the phosphorus concentration of 5×10¹⁸ atoms per centimeter squared was 3.5 nanometers per decade.

When the process conditions were Lo PAI, 2 kV bias, a phosphorus dose of 1.0×10¹⁶ atoms per centimeter squared, with no clean and no anneal, the junction at a phosphorus concentration of 5×10¹⁸ atoms per centimeter squared was measured to be 19.7 nanometers. In addition, the abruptness of the junction was found to be 2.8 nanometers per decade.

When the process conditions were Hi PAI, 2 kV bias, a phosphorus dose of 1.0×10¹⁶ atoms per centimeter squared, with a clean and an anneal, the sheet resistance was measured at 406.24 ohms per square centimeter and the junction at a phosphorus concentration of 5×10¹⁸ atoms per centimeter squared was measured to be 25 nanometers. In addition, the abruptness of the junction was found to be 5.5 nanometers per decade.

When the process conditions were Lo PAI, 2 kV bias, a phosphorus dose of 1.0×10¹⁶ atoms per centimeter squared, with a clean and an anneal, the sheet resistance was measured at 381.94 ohms per square centimeter and the junction at a phosphorus concentration of 5×10¹⁸ atoms per centimeter squared was measured to be 28 nanometers. In addition, the abruptness of the junction was found to be 7.6 nanometers per decade. As the measurements show, a desirable abruptness at the junction can be achieved using the embodiment process disclosed herein.

In an embodiment, the desired concentration of phosphorus was between about 1.0×10²¹ atoms per centimeter cubed and about 5.0×10²¹ atoms per centimeter cubed at a depth of about eight nanometers to about ten nanometers. As the graph 90 of FIG. 14 illustrates, the actual concentration of phosphorus was between about 1.0×10²¹ atoms per centimeter cubed and about 3.0×10²¹ atoms per centimeter cubed at a depth of about eight nanometers to about ten nanometers when a process similar to that depicted in FIGS. 3-8 was employed to form the source/drain regions. As illustrated in FIG. 14, even after the clean and anneal steps have been performed a suitably abrupt junction (abr) of either 5.5 nanometers per decade or 7.6 nanometers per decade is achieved.

By generating a concentration of phosphorous within the desired range at a depth of about 8-10 nanometers into the source/drain region after the silicide layer has been formed, the source/drain resistance is desirably or beneficially reduced. As noted above, the depth of 8-10 nanometers is chosen to mitigate surface noise effects, corresponds to the depth of the silicide, and corresponds to a location of the Schottky barrier at the junction of the silicide and the underlying doped source/drain material. In an embodiment, the source/drain resistance is reduced between about 30% to about 70% percent. As can be seen in FIG. 8 and FIG. 13, where the source/drain epitaxy 34/64 protrudes higher than a top surface of the substrate, the silicide 42/70 can be formed higher than the top surface of the substrate. Consequently, at least a portion of the junction can also be formed higher than the top surface of the substrate.

Referring now to FIG. 15, another graph 92 illustrating the concentration of phosphorus is provided. Similar to FIG. 14, the graph 92 includes several curves representing the phosphorus concentration (Y-axis) relative to the depth of the source/drain (X-axis). As shown, each of the curves was produced using an energy or bias of 2 kV or 4 kV. In addition, the curves reflect using either a Hi PAI or Lo PAI, employing a clean or not, and employing an anneal or not. For the illustrated doping conditions in FIG. 15, the dose of the phosphorus retained in the source/drain was calculated from the curves to be 3.67×10¹⁵ atoms per centimeter squared, 3.85×10¹⁵ atoms per centimeter squared, 8.73×10¹⁵ atoms per centimeter squared, 8.66×10¹⁵ atoms per centimeter squared, 1.1×10¹⁵ atoms per centimeter squared, 1.13×10¹⁵ atoms per centimeter squared, 2.1×10¹⁵ atoms per centimeter squared, and 1.87×10¹⁵ atoms per centimeter squared. As shown in FIG. 15, the curves illustrate that, depending on the process conditions chosen, a suitable abruptness (abr) at a phosphorus concentration of between about 1.0×10²² atoms per centimeter cubed and about 5.0×10²¹ atoms per centimeter cubed and a junction depth at about 8-10 nanometers is achievable.

In an embodiment, the desired concentration of phosphorus was between about 1.0×10²¹ atoms per centimeter cubed and about 5.0×10²¹ atoms per centimeter cubed at a depth of about eight nanometers to about ten nanometers. As the graph 92 illustrates, the actual concentration of phosphorus was between about 1.0×10²¹ atoms per centimeter cubed and about 3.0×10²¹ atoms per centimeter cubed at a depth of about eight nanometers to about ten nanometers when a process similar to that depicted in FIGS. 3-8 was employed to form the source/drain regions.

Referring now to FIG. 16, a series of images 94 obtained by a transmission electron microscope (TEM) are provided. As will be more fully explained below, the image 94 a illustrates an image of the source/drain region in an intermediate stage of formation where damage is still present. The corresponding image 94 b illustrates the source/drain region after the damage in the image 94 a has been repaired by the anneal process. Likewise, the image 94 c illustrates an image of the source/drain region in an intermediate stage of formation where damage is still present. The corresponding image 94 d illustrates the source/drain region after the damage in the image 94 c has been repaired by the anneal process. The anneal process is able to provide the full recrystalline recovery in the images 94 b, 94 d because the embodiment doping processes described herein were employed.

Still referring to FIG. 16, the process conditions for the top left image were an energy of 2 kV, a phosphorus dose of 1.0×10¹⁶ atoms per centimeter squared, a Hi PAI, with no clean and no anneal. The process conditions for the top right image were an energy of 2 kV, a phosphorus dose of 1.0×10¹⁶ atoms per centimeter squared, a Lo PAI, with no clean and no anneal.

The process conditions for the bottom left image were an energy of 2 kV, a phosphorus dose of 1.0×10¹⁶ atoms per centimeter squared, a Hi PAI, with a clean and an anneal. The process conditions for the bottom right image were an energy of 2 kV, a phosphorus dose of 1.0×10¹⁶ atoms per centimeter squared, a Lo PAI, with a clean and an anneal. In contrast to the top two images, which illustrate damage, the bottom two images illustrate a full recrystalline recovery when embodiment processes as disclosed herein are used. In other words, a full recrystallization may be achieved by way of the anneal.

From the foregoing, with regard to the process depicted in FIGS. 3-8 and 9-13, it should be recognized that the plasma doping of the helium may act as a buffer layer to retard or prevent post-plasma doping phosphorous dopant diffusion. In addition, the phosphorus dopant abruptness of less than about three nanometers per decade may be retained, as shown in FIGS. 14-15.

In addition, when the plasma doping of the phosphorous is performed after the PAI plasma doping of the helium, the energy and dose may be tuned to achieve a desired phosphorous concentration at a desired depth to provide a source/drain resistance (Rcsd) reduction after silicide formation. For example, the phosphorous concentration may be between about 2.0×10²¹ atoms/cm³ and about 4.0×10²¹ atoms/cm³ at a depth of between about eight nanometers to about twelve nanometers into the source/drain region after the silicide layer has been formed for suitable or desirable source/drain resistance reduction.

With regard to the process depicted in FIGS. 9-13, it should be recognized that a fast doping time (e.g., under 15 seconds) may be achieved by simultaneously doping the boron and the helium. In addition, an abrupt junction of less than about 0.5 nanometers per decade may be achieved, which fulfills the short channel effect (SCE) requirement. Further, an ion gain performance of between about 3-5% may be realized.

An embodiment method of forming a source/drain region for a transistor is provided. The method includes forming a recess in a substrate and epitaxially growing a semiconductor material in the recess. The method also includes amorphizing the semiconductor material and doping the semiconductor material with a dopant to form the source/drain region.

An embodiment method of forming a source/drain region for a transistor includes forming a recess in a substrate, epitaxially growing a semiconductor material in the recess, performing a pre-amorphization doping of the semiconductor material using a first plasma doping, and doping the semiconductor material with phosphorus using a second plasma doping to form the source/drain region.

An embodiment method of forming source/drain regions includes forming a recess in a substrate, epitaxially growing a semiconductor material in the recess, a doping the semiconductor material with boron and helium using plasma doping to form the source/drain region.

While the disclosure provides illustrative embodiments, this description is not intended to be construed in a limiting sense. Various modifications and combinations of the illustrative embodiments, as well as other embodiments, will be apparent to persons skilled in the art upon reference to the description. It is therefore intended that the appended claims encompass any such modifications or embodiments. 

What is claimed is:
 1. A method of forming a source/drain region for a transistor, comprising: forming a first recess in a substrate; epitaxially growing a first semiconductor material in the first recess; performing a first plasma implant comprising a pre-amorphization implant to the first semiconductor material; following the first plasma implant, performing a second plasma doping comprising doping the first semiconductor material with phosphorus to form a first ultra-shallow junction in a first source/drain region, wherein the second plasma doping of the phosphorous is performed at a continuously decreasing energy level; after the second plasma doping, forming a silicide layer over the first source/drain region; and performing a microwave anneal on the first source/drain region at a first temperature between 300 and 600 degrees Celsius, wherein the microwave anneal substantially repairs damaged portions of a crystalline structure of the first source/drain region, wherein a concentration of the phosphorus at the first ultra-shallow junction is between about 2.0×10²¹ atoms per centimeter cubed and about 4.0×10²¹ atoms per centimeter cubed at a junction depth of about 8 to 10 nanometers.
 2. The method of claim 1, wherein the pre-amorphization implant is performed at least in part by implanting helium into the first semiconductor material.
 3. The method of claim 1, wherein the first semiconductor material comprises silicon phosphorous having a phosphorous concentration of less than about 1×10²⁰ atoms per centimeter cubed to about 7×10²⁰ atoms per centimeter cubed.
 4. The method of claim 1, wherein a collective process time of the first plasma implant and the second plasma doping is less than about thirty seconds.
 5. The method of claim 1, wherein the first plasma implant includes implanting helium at a continuously decreasing energy level.
 6. The method of claim 1, wherein a part of the first ultra-shallow junction is higher than a top surface of the substrate.
 7. The method of claim 1, wherein the microwave anneal uses free carrier absorption and dipole resonance heating.
 8. The method of claim 1, further comprising: performing a third plasma doping/implant comprising doping a semiconductor material with boron simultaneously with implanting helium to form a second ultra-shallow junction in a second source/drain region, wherein the third plasma doping/implant is performed at a continuously decreasing energy; after the third doping/implant, forming a second silicide over the second source/drain region; and wherein a concentration of the boron in the second source/drain region beneath the second silicide is between about 3.0×10¹⁵ atoms per centimeter cubed and about 1.0×10¹⁶ atoms per centimeter cube at a depth of about 8 to 12 nanometers, and wherein an abruptness of boron at the second ultra-shallow junction is less than about 0.5 nanometers per decade.
 9. The method of claim 1, wherein the continuously decreasing energy level of the second plasma doping is in a range of about 6 kiloelectron-volts (keV) to about 4 kiloelectron-volts (keV), wherein a decreasing phosphorous concentration of 5.0×10¹⁸ atoms per centimeter cube is between a depth of about 25 and 28 nm, wherein an abruptness of the decreasing concentration is about 5.5 to about 7.5 nanometers per decade, and wherein a resistance of the first source/drain region is reduced between about 30% to about 70%.
 10. A method of forming a source/drain region for a transistor, comprising: forming a recess in a substrate; epitaxially growing a semiconductor material in the recess; performing a doping of the semiconductor material with boron simultaneously with an implant of helium using a simultaneous plasma doping/implant to form an ultra-shallow function in the source/drain region; after the doping the semiconductor material, forming a silicide over the source/drain region; and performing a microwave anneal on the source/drain region at a first temperature between 300 and 600 degrees Celsius to substantially repair a damaged crystalline structure of the source/drain region, wherein a part of the ultra-shallow junction is higher than a top surface of the substrate, wherein a concentration of the boron in the source/drain region beneath the silicide is between about 3.0×10¹⁵ atoms per centimeter cubed and about 1.0×10¹⁶ atoms per centimeter cube at a depth of about 8 to 12 nanometers, and wherein an abruptness of boron at the ultra-shallow junction is less than about 0.5 nanometers per decade.
 11. The method of claim 10, wherein semiconductor material comprises silicon germanium boron (SiGeB).
 12. The method of claim 10, wherein the doping utilizes B₂H₆ and a dose of the boron is about 4.5×10¹⁶ atoms per centimeter squared.
 13. The method of claim 10, wherein the simultaneous plasma doping/implant comprises utilizing about 0.5% B₂H₆ and about 99.5% helium.
 14. The method of claim 10, wherein a process time of the plasma doping/implant is less than fifteen seconds.
 15. A method of forming a source/drain region for a transistor, comprising: forming first recesses adjacent a first dummy gate in a substrate; forming second recesses adjacent a second dummy gate in the substrate; epitaxially growing a first semiconductor material in the first recesses; epitaxially growing a second semiconductor material in the second recesses; after the epitaxially growing the first semiconductor material, performing a pre-amorphization implant of the first semiconductor material using a first plasma helium implant; after the performing the pre-amorphization implant, doping the first semiconductor material with an n-type dopant using a second plasma doping to form first source/drain regions, the first source/drain regions having ultra-shallow junctions, wherein the second plasma doping is performed at a continuously decreasing energy in a range of about 6 kiloelectron-volts (keV) to about 4 kiloelectron-volts (keV) during the second plasma doping, wherein a part of each of the ultra-shallow junctions is higher than a top surface of the substrate; after the second plasma doping, forming a silicide over the first source/drain regions; performing an anneal on the first source/drain region to substantially repair a damaged crystalline structure of the first source/drain regions; after the epitaxially growing the second semiconductor material, doping the second semiconductor material with a p-type dopant and simultaneously implanting helium using a third plasma doping/implanting to form second source/drain regions, the second source/drain regions having ultra-shallow junctions; after the simultaneous doping/implanting, forming a silicide over the second source/drain regions; and performing an anneal on the second source/drain regions to substantially repair a damaged crystalline structure of the second source/drain regions.
 16. The method of claim 15, wherein the first plasma helium implant is performed at least in part by continuously decreasing an energy level during the first plasma implant and wherein a concentration of helium of the helium implant is about 1.0×10¹⁶ to about 2.0×10¹⁶ atoms per centimeter cubed.
 17. The method of claim 15, wherein the second semiconductor material comprises silicon germanium boron (SiGeB).
 18. The method of claim 15, wherein the anneal is a a microwave anneal using free carrier absorption and dipole resonance heating.
 19. The method of claim 15, wherein a concentration of boron in the first source/drain region beneath the silicide is between about 3.0×10¹⁵ atoms per centimeter cubed and about 1.0×10¹⁶ atoms per centimeter cube at a depth of about 8 to 12 nanometers, and wherein an abruptness of boron at the ultra-shallow junctions is less than about 0.5 nanometers per decade.
 20. The method of claim 15, wherein a peak doping concentration of phosphorous in the first source/drain region beneath the silicide is between about 2.0×10²¹ atoms per centimeter cubed and about 4.0×10²¹ atoms per centimeter cube at a depth of about 8 to 10 nanometers, wherein a decreasing phosphorous concentration of 5.0×10¹⁸ atoms per centimeter cube is between a depth of about 25 and 28 nm, and wherein an abruptness of the decreasing phosphorous concentration is about 5.5 to about 7.5 nanometers per decade. 